Search

Start Over Graduate Program Mechanical Engineering Year 2010 Access Level open_access

71. DESIGN, FABRICATION AND CHARACTERIZATION OF MICROMACHINED PIEZOELECTRIC T-BEAM TRANSDUCERS

open_access
Open Access
Author:
Zhang, Zheqian
Title:
DESIGN, FABRICATION AND CHARACTERIZATION OF MICROMACHINED PIEZOELECTRIC T-BEAM TRANSDUCERS
Graduate Program:
Mechanical Engineering
Keywords:
multifunctional transducers
PZT
piezoelectric
MEMS
File:
Download DESIGN_FABRICATION_AND_CHARACTERIZATION_OF_MICROMACHINED_PIEZOELECTRIC_T-BEAM_TRANSDUCERS.pdf
Committee Members:
Christopher Rahn, Thesis Advisor/Co-Advisor
Christopher Rahn, Thesis Advisor/Co-Advisor
Srinivas A Tadigadapa, Thesis Advisor/Co-Advisor
Donghai Wang, Thesis Advisor/Co-Advisor