1. A Hybrid CFD-DSMC Model Designed to Simulate Rapidly Rarefying Flow Fields and its Application to Physical Vapor Deposition Open Access Author: Gott, Kevin Nathaniel Title: A Hybrid CFD-DSMC Model Designed to Simulate Rapidly Rarefying Flow Fields and its Application to Physical Vapor Deposition Graduate Program: Mechanical Engineering Keywords: Physical Vapor DepositionCFDDSMCMulti-physics ModelingVacuumCoatings File: Download KGott_Dissertation.pdf Committee Members: Anil Kamalakant Kulkarni, Dissertation Advisor/Co-AdvisorJogender Singh, Committee MemberDaniel Connell Haworth, Committee MemberSavas Yavuzkurt, Committee Member
