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Author:

Borman, Trent Mitchell

Title:

Magnetron sputtering of multicomponent refractory thin films

Graduate Program:

Materials Science and Engineering

Keywords:

UHTCs
sputtering
HiPIMS
reactive sputtering
refractory
thin films
UHTC
carbide
carbides

File:

Download TrentBormanDissertation.pdf

Committee Members:

Jon-Paul Maria, Dissertation Advisor/Co-Advisor
Jon-Paul Maria, Committee Chair/Co-Chair
Susan B Sinnott, Committee Member
Joshua Alexander Robinson, Committee Member
Brian Foley, Outside Member
John C Mauro, Program Head/Chair